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ISO 20341:2003Published

Surface chemical analysis — Secondary-ion mass spectrometry — Method for estimating depth resolution parameters with multiple delta-layer reference materials

Analyse chimique des surfaces — Spectrométrie de masse des ions secondaires — Méthode d'estimation des paramètres de résolution en profondeur à l'aide de matériaux de référence multicouches minces

Abstract / scope

ISO 20341:2003 specifies procedures for estimating three depth resolution parameters, viz the leading-edge decay length, the trailing-edge decay length and the Gaussian broadening, in SIMS depth profiling using multiple delta-layer reference materials.

It is not applicable to delta-layers where the chemical and physical state of the near-surface region, modified by the incident primary ions, is not in the steady state.