ISO 22048:2004Published

Surface chemical analysis — Information format for static secondary-ion mass spectrometry

Analyse chimique des surfaces — Protocole de l'information pour la spectrométrie de masse des ions secondaires (SIMS) en mode statique

Abstract / scope

ISO 22048:2004 provides a digital format to store, and transfer between computers, in a compact way, important calibration and instrumental-parameter data necessary to make effective use of spectral-data files from static SIMS instruments. This format is designed to supplement the data transfer format specified in ISO 14976.