ISO/TR 14999-3:2005Published

Optics and photonics — Interferometric measurement of optical elements and optical systems — Part 3: Calibration and validation of interferometric test equipment and measurements

Optique et photonique — Mesurage interférométrique de composants et systèmes optiques — Partie 3: Étalonnage et validation des équipements d'essai interférométrique

Abstract / scope

ISO/TR 14999-3:2005 discusses sources of error and the separation of errors into symmetric and non-symmetric parts. It also describes the reliance of measurements on the quality of a physical reference surface and the development of test procedures capable of achieving absolute calibration.