ISO 13083:2015Published

Surface chemical analysis — Scanning probe microscopy — Standards on the definition and calibration of spatial resolution of electrical scanning probe microscopes (ESPMs) such as SSRM and SCM for 2D-dopant imaging and other purposes

Analyse chimique des surfaces - Microscopie à sonde à balayage - Normes sur la définition et l'étalonnage de la résolution spatiale des microscopes électriques à sonde à balayage (ESPMs) comme SSRM et SCM pour l'imagerie 2D-dopant et d'autres fins

Abstract / scope

ISO 13083:2015 describes a method for measuring the spatial (lateral) resolution of scanning capacitance microscopes (SCMs) or scanning spreading resistance microscopes (SSRMs), which are widely used in imaging the distribution of carriers and other electrical properties in semiconductor devices. The method involves the use of a sharp-edged artefact.