Abstract / scope
ISO/TR 18394:2016 provides guidelines for identifying chemical effects in X-ray or electron-excited Auger-electron spectra and for using these effects in chemical characterization.
ISO/TR 18394:2016Published
Surface chemical analysis — Auger electron spectroscopy — Derivation of chemical information
Analyse chimique des surfaces — Spectroscopie des électrons Auger — Déduction de l'information chimique