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ISO 19668:2017Published

Surface chemical analysis — X-ray photoelectron spectroscopy — Estimating and reporting detection limits for elements in homogeneous materials

Analyse chimique des surfaces — Spectroscopie de photoélectrons par rayons X — Estimation et production de rapports sur les limites de détection des éléments contenus dans les matériaux homogènes

Abstract / scope

ISO 19668:2017 specifies a procedure by which elemental detection limits in X-ray photoelectron spectroscopy (XPS) can be estimated from data for a particular sample in common analytical situations and reported. This document is applicable to homogeneous materials and is not applicable if the depth distribution of elements is inhomogeneous within the information depth of the technique.