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ISO 19685:2017Published

Vacuum technology — Vacuum gauges — Specifications, calibration and measurement uncertainties for Pirani gauges

Technique du vide - Manomètres à vide - Spécifications, étalonnage et incertitudes de mesure des manomètres Pirani

Abstract / scope

ISO 19685:2017 identifies parameters of Pirani gauges, their calibration procedure, and describes measurement uncertainties to be considered when operating these gauges.

ISO 19685:2017 applies to Pirani vacuum gauges operating over a pressure range of 0,01 Pa to 150 kPa.

ISO 19685:2017 complements ISO 3567 and ISO 27893 when calibrating Pirani gauges and using them as reference standards.

In addition, ISO 19685:2017 defines procedures to characterize Pirani gauges for response time and hysteresis.