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ISO 20146:2019Published

Vacuum technology — Vacuum gauges — Specifications, calibration and measurement uncertainties for capacitance diaphragm gauges

Technique du vide — Manomètres à vide — Spécifications, étalonnage et incertitudes de mesure des manomètres capacitifs à membrane

Abstract / scope

This document defines terms related to capacitance diaphragm gauges (CDGs), specifies which parameters have to be given for CDGs, details their calibration procedure and describes which measurement uncertainties have to be considered when operating these gauges.

This document complements ISO 3567 and ISO 27893 when calibrating CDGs and using them as reference standards.