Abstract / scope
This document gives fundamental explanations to interferometric measurement objects, describes hardware aspects of interferometers and evaluation methods, and gives recommendations for test reports and calibration certificates.
ISO/TR 14999-2:2019Published
Optics and photonics — Interferometric measurement of optical elements and optical systems — Part 2: Measurement and evaluation techniques
Optique et photonique — Mesurage interférométrique de composants et systèmes optiques — Partie 2: Mesurage et techniques d'évaluation