Abstract / scope
This document defines terms for surface chemical analysis in the area of optical interface analysis including ellipsometry, Raman spectroscopy and nonlinear optical techniques as well as general optical terms.
ISO 18115-3:2022Published
Surface chemical analysis — Vocabulary — Part 3: Terms used in optical interface analysis
Analyse chimique des surfaces — Vocabulaire — Partie 3: Termes utilisés dans l'analyse des interfaces optiques