ISO 21360-6:2023Published

Vacuum technology — Standard methods for measuring vacuum-pump performance — Part 6: Cryogenic vacuum pumps

Technique du vide — Méthodes normalisées pour mesurer les performances des pompes à vide — Partie 6: Pompes à vide cryogéniques

Abstract / scope

This document specifies methods for measuring the volume flow rate, maximum throughput, pumping capacity, base pressure cryogenic vacuum pump, cooldown time and crossover value of cryogenic vacuum pumps.

It is applicable to two-stage, closed-loop gaseous helium cryogenic vacuum pumps, which can be directly flanged to a vacuum chamber.