Abstract / scope
This document defines terms for surface chemical analysis. ISO 18115-1 covers general terms and those used in spectroscopy while this document covers terms used in scanning probe microscopy.
ISO 18115-2:2021Published
Surface chemical analysis — Vocabulary — Part 2: Terms used in scanning-probe microscopy
Analyse chimique des surfaces — Vocabulaire — Partie 2: Termes utilisés en microscopie à sonde à balayage