Abstract / scope
This document defines the most commonly used terms for transmission electron microscopy (TEM) specimen preparation using focused ion beam (FIB).
ISO 17297:2025Published
Microbeam analysis — Focused ion beam application for TEM specimen preparation — Vocabulary
Analyse par microfaisceaux — Application de faisceaux d'ions focalisés pour la préparation d'éprouvettes de MET — Vocabulaire