ISO 23699:2026Published

Microbeam analysis — Electron backscatter diffraction — Vocabulary

Analyse par microfaisceaux — Diffraction d'électrons rétrodiffusés — Vocabulaire

Abstract / scope

This document defines terms used for the electron backscatter diffraction (EBSD) technique. This document covers both general and specific concepts classified according to their hierarchy in a systematic order.

This document is applicable to standardization documents relevant to EBSD practices. In addition, some definitions in this document are applicable to transmission Kikuchi diffraction (TKD).