ISO 3530:1979Published

Vacuum technology — Mass-spectrometer-type leak-detector calibration

Technique du vide — Étalonnage des spectromètres de masse détecteurs de fuites

Abstract / scope

Only leak detectors are described which have an integral high vacuum system to maintain the sensing element of the mass spectrometer at a low pressure. Two procedures are outlined, one to determine the minimum detectable leak rate and the other for determination of the minimum detectable concentration ratio.