ISO/AWI TS 22933Under development

Surface chemical analysis — Secondary ion mass spectrometry — Method for the measurement of mass resolution in SIMS

Analyse chimique des surfaces — Spectrométrie de masse des ions secondaires — Méthode pour le mesurage de la résolution en masse dans la SIMS

Abstract / scope

This document specifies a method for measuring the mass resolution in SIMS, and how to compare the mass resolution between different instruments (e.g. TOF-SIMS, Magnetic SIMS, Quadrupole SIMS, Fourier Transform SIMS, etc.) by considering the peak shapes.

Life cycle

Replaces

ISO/TS 22933:2022PublishedSurface chemical analysis — Secondary ion mass spectrometry — Method for the measurement of mass resolution in SIMSTechnical Specification · Published 1 Apr 2022 · ISO/TC 201/SC 6