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ISO 5820:2024PublishedMicrobeam analysis — Hyper-dimensional data file specification (HMSA)ISO 14595:2023PublishedMicrobeam analysis — Electron probe microanalysis — Guidelines for the specification of certified reference materials (CRMs)ISO 15632:2021PublishedMicrobeam analysis — Selected instrumental performance parameters for the specification and checking of energy-dispersive X-ray spectrometers (EDS) for use with a scanning electron microscope (SEM) or an electron probe microanalyser (EPMA)ISO 17470:2014PublishedMicrobeam analysis — Electron probe microanalysis — Guidelines for qualitative point analysis by wavelength dispersive X-ray spectrometryISO 20720:2018PublishedMicrobeam analysis — Methods of specimen preparation for analysis of general powders using WDS and EDSISO 22029:2022PublishedMicrobeam analysis — EMSA/MAS standard file format for spectral-data exchangeISO 22309:2011PublishedMicrobeam analysis — Quantitative analysis using energy-dispersive spectrometry (EDS) for elements with an atomic number of 11 (Na) or aboveISO 22489:2016PublishedMicrobeam analysis — Electron probe microanalysis — Quantitative point analysis for bulk specimens using wavelength dispersive X-ray spectroscopyISO 23703:2022PublishedMicrobeam analysis — Guidelines for misorientation analysis to assess mechanical damage of austenitic stainless steel by electron backscatter diffraction (EBSD)ISO 23833:2013PublishedMicrobeam analysis — Electron probe microanalysis (EPMA) — VocabularyISO/DIS 5820Under developmentMicrobeam analysis — Hyper-dimensional data file specification (HMSA)ISO 14595:2014WithdrawnMicrobeam analysis — Electron probe microanalysis — Guidelines for the specification of certified reference materials (CRMs)ISO 14595:2003WithdrawnMicrobeam analysis — Electron probe microanalysis — Guidelines for the specification of certified reference materials (CRMs)ISO 15632:2012WithdrawnMicrobeam analysis — Selected instrumental performance parameters for the specification and checking of energy-dispersive X-ray spectrometers for use in electron probe microanalysisISO 15632:2002WithdrawnMicrobeam analysis — Instrumental specification for energy dispersive X-ray spectrometers with semiconductor detectorsISO 17470:2004WithdrawnMicrobeam analysis — Electron probe microanalysis — Guidelines for qualitative point analysis by wavelength dispersive X-ray spectrometryISO 22029:2012WithdrawnMicrobeam analysis — EMSA/MAS standard file format for spectral-data exchangeISO 22029:2003WithdrawnStandard file format for spectral data exchangeISO 22309:2006WithdrawnMicrobeam analysis — Quantitative analysis using energy-dispersive spectrometry (EDS)ISO 22489:2006WithdrawnMicrobeam analysis — Electron probe microanalysis — Quantitative point analysis for bulk specimens using wavelength-dispersive X-ray spectroscopyISO 23833:2006WithdrawnMicrobeam analysis — Electron probe microanalysis (EPMA) — Vocabulary