Abstract / scope
ISO 25178-604:2013 specifies the metrological characteristics of coherence scanning interferometry (CSI) systems for 3D mapping of surface height.
ISO 25178-604:2013Withdrawn
Geometrical product specifications (GPS) — Surface texture: Areal — Part 604: Nominal characteristics of non-contact (coherence scanning interferometry) instruments
Spécification géométrique des produits (GPS) — État de surface: Surfacique — Partie 604: Caractéristiques nominales des instruments sans contact (à interférométrie par balayage à cohérence)
This edition has been replaced by ISO 25178-604:2025.