ISO 25178-604:2025Published

Geometrical product specifications (GPS) — Surface texture: Areal — Part 604: Design and characteristics of non-contact (coherence scanning interferometry) instruments

Spécification géométrique des produits (GPS) — État de surface: Surfacique — Partie 604: Conception et caractéristiques des instruments sans contact (à interférométrie par balayage à cohérence)

Abstract / scope

This document specifies the design and metrological characteristics of coherence scanning interferometry (CSI) instruments for the areal measurement of surface topography. Because surface profiles can be extracted from surface topography data, the methods described in this document are also applicable to profiling measurements.

Life cycle

Replaces

ISO 25178-604:2013WithdrawnGeometrical product specifications (GPS) — Surface texture: Areal — Part 604: Nominal characteristics of non-contact (coherence scanning interferometry) instrumentsInternational Standard · Published 24 Jul 2013 · ISO/TC 213