Abstract / scope
ISO 25178-603:2013 describes the metrological characteristics of phase-shifting interferometric (PSI) profile and areal surface texture measuring microscopes.
ISO 25178-603:2013Withdrawn
Geometrical product specifications (GPS) — Surface texture: Areal — Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments
Spécification géométrique des produits (GPS) — État de surface: Surfacique — Partie 603: Caractéristiques nominales des instruments sans contact (microscopes interférométriques à glissement de franges)
This edition has been replaced by ISO 25178-603:2025.