ISO 25178-603:2025Published

Geometrical product specifications (GPS) — Surface texture: Areal — Part 603: Design and characteristics of non-contact (phase shifting interferometry) instruments

Spécification géométrique des produits (GPS) — État de surface: Surfacique — Partie 603: Conception et caractéristiques des instruments sans contact (à interférométrie à glissement de franges)

Abstract / scope

This document specifies the design and metrological characteristics of phase shifting interferometry (PSI) instruments for the areal measurement of surface topography. Because surface profiles can be extracted from areal surface topography data, the methods described in this document are also applicable to profiling measurements.

Life cycle

Replaces

ISO 25178-603:2013WithdrawnGeometrical product specifications (GPS) — Surface texture: Areal — Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instrumentsInternational Standard · Published 25 Sep 2013 · ISO/TC 213