ISO 14644-16:2019Published

Cleanrooms and associated controlled environments — Part 16: Energy efficiency in cleanrooms and separative devices

Salles propres et environnements maîtrisés apparentés — Partie 16: Efficacité énergétique dans les salles propres et les dispositifs séparatifs

Abstract / scope

This document gives guidance and recommendations for optimizing energy usage and maintaining energy efficiency in new and existing cleanrooms, clean zones and separative devices. It provides guidance for the design, construction, commissioning and operation of cleanrooms.

This document covers all cleanroom-specific features and can be used in different areas to optimize energy use in electronic, aerospace, nuclear, pharmaceutical, hospital, medical device, food industries and other clean air applications.

It also introduces the concept of benchmarking for the performance assessment and comparison of cleanroom energy efficiencies, while maintaining performance levels to ISO 14644 requirements[2][3].