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ISO 14644-14:2026PublishedCleanrooms and associated controlled environments — Part 14: Assessment of suitability for use of equipment by airborne particle concentrationISO 14644-15:2026PublishedCleanrooms and associated controlled environments — Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentrationISO 14644-13:2026PublishedCleanrooms and associated controlled environments — Part 13: Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical concentrationISO 14644-5:2025PublishedCleanrooms and associated controlled environments — Part 5: OperationsISO 14644-18:2023PublishedCleanrooms and associated controlled environments — Part 18: Assessment of suitability of consumablesISO/TR 14644-21:2023PublishedCleanrooms and associated controlled environments — Part 21: Airborne particle sampling techniquesISO 14644-9:2022PublishedCleanrooms and associated controlled environments — Part 9: Assessment of surface cleanliness for particle concentrationISO 14644-8:2022PublishedCleanrooms and associated controlled environments — Part 8: Assessment of air cleanliness by chemical concentration (ACC)ISO 14644-4:2022PublishedCleanrooms and associated controlled environments — Part 4: Design, construction and start-upISO 14644-10:2022PublishedCleanrooms and associated controlled environments — Part 10: Assessment of surface cleanliness for chemical contaminationISO 14644-17:2021PublishedCleanrooms and associated controlled environments — Part 17: Particle deposition rate applicationsISO 14644-3:2019PublishedCleanrooms and associated controlled environments — Part 3: Test methodsISO 14644-16:2019PublishedCleanrooms and associated controlled environments — Part 16: Energy efficiency in cleanrooms and separative devicesISO 14644-12:2018PublishedCleanrooms and associated controlled environments — Part 12: Specifications for monitoring air cleanliness by nanoscale particle concentrationISO 14644-2:2015PublishedCleanrooms and associated controlled environments — Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentrationISO 14644-1:2015PublishedCleanrooms and associated controlled environments — Part 1: Classification of air cleanliness by particle concentrationISO 14644-7:2004PublishedCleanrooms and associated controlled environments — Part 7: Separative devices (clean air hoods, gloveboxes, isolators and mini-environments)ISO/DIS 14644-7Under developmentCleanrooms and associated controlled environments — Part 7: Separative devicesISO 14644-13:2017WithdrawnCleanrooms and associated controlled environments — Part 13: Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical classificationsISO 14644-15:2017WithdrawnCleanrooms and associated controlled environments — Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentrationISO 14644-14:2016WithdrawnCleanrooms and associated controlled environments — Part 14: Assessment of suitability for use of equipment by airborne particle concentrationISO 14644-10:2013WithdrawnCleanrooms and associated controlled environments — Part 10: Classification of surface cleanliness by chemical concentrationISO 14644-8:2013WithdrawnCleanrooms and associated controlled environments — Part 8: Classification of air cleanliness by chemical concentration (ACC)ISO 14644-9:2012WithdrawnCleanrooms and associated controlled environments — Part 9: Classification of surface cleanliness by particle concentrationISO 14644-6:2007WithdrawnCleanrooms and associated controlled environments — Part 6: Vocabulary