ISO 25178-607:2019Published

Geometrical product specifications (GPS) — Surface texture: Areal — Part 607: Nominal characteristics of non-contact (confocal microscopy) instruments

Spécification géométrique des produits (GPS) — État de surface: Surfacique — Partie 607: Caractéristiques nominales des instruments sans contact (microscopie confocale)

A new edition is under development: ISO/DIS 25178-607.

Abstract / scope

This document describes the influence quantities and instrument characteristics of confocal microscopy systems for areal measurement of surface topography. Because surface profiles can be extracted from surface topography images, the methods described in this document can be applied to profiling measurements as well.

Life cycle

Replaced by

ISO/DIS 25178-607Under developmentGeometrical product specifications (GPS) — Surface texture: Areal — Part 607: Design and characteristics of non-contact (confocal microscopy) instrumentsInternational Standard · ISO/TC 213