ISO/DIS 25178-607Under development

Geometrical product specifications (GPS) — Surface texture: Areal — Part 607: Design and characteristics of non-contact (confocal microscopy) instruments

Spécification géométrique des produits (GPS) — État de surface: Surfacique — Partie 607: Conception et caractéristiques des instruments sans contact (microscopie confocale)

Abstract / scope

This document describes the influence quantities and instrument characteristics of confocal microscopy systems for areal measurement of surface topography. Because surface profiles can be extracted from surface topography images, the methods described in this document can be applied to profiling measurements as well.

Life cycle

Replaces

ISO 25178-607:2019PublishedGeometrical product specifications (GPS) — Surface texture: Areal — Part 607: Nominal characteristics of non-contact (confocal microscopy) instrumentsInternational Standard · Published 5 Mar 2019 · ISO/TC 213